NASA 1996 SBIR Phase I


PROPOSAL NUMBER : 96-1 13.08-4137

PROJECT TITLE : Soft X-ray Filters designed for transmission between 40 and 170

TECHNICAL ABSTRACT (LIMIT 200 WORDS)

There is a need for soft x-ray filters with significantly higher transmission in the wavelength region from 40 to 170 for use in solar astronomy. These filters also need to provide better visible light rejection and longer life. Today, there are no effective filters available for this spectral range. The proposed innovation is a new generation of filters fabricated with the aid of ion-assisted deposition and utilizing new multilayer combinations of materials to optimize performance in the spectral region of interest. The objective of the effort will be to explore the use of various candidate materials and combinations of materials based on prior experience, and then to show feasibility by producing test filters during Phase I. It is anticipated that major improvements in filter performance can be demonstrated during Phase I and that the manufacturing techniques needed to produce these filters can be developed during Phase II. The benefit to NASA will be improved performance of the future scientific payloads needed to perform new astronomy experiments at lower cost.
POTENTIAL COMMERCIAL APPLICATIONS
Soft x-ray projection lithography in the wavelength range of 50 to 200 offers the greatest hope for the fabrication of integrated circuits with design rules ultimately reaching below 0.1(m. Filters between sections of the stepper are essential parts of these fabrication systems and the filters developed under this proposal will be directly applicable.
NAME AND ADDRESS OF PRINCIPAL INVESTIGATOR
Craig W. Andrus
Luxel Corporation
P.O. 1879
Friday Harbor, WA 98250

NAME AND ADDRESS OF OFFEROR
Luxel Corporation
515 Tucker Avenue
P.O. Box 1879
Friday Harbor, WA 98250