SBIR 95-1 SOLICITATION

PROJECT SUMMARY

Proposal Number:

15.01-3460

Project Title:

MODEL BASED CALLIBRATION OF HIGH TEMPERATURE FURNACES

Technical Abstract:

It is proposed to develop a model-based approach to calibration of high temperature furnaces. The control thermocouples in the ground NASA Crystal Growth Furnace have been reported to have drifted and currently have an error of about 12K. Errors of this magnitude have significant adverse effects on the quality of ground and space experiments, and compromises the ability of investigators to plan and execute experiments. The proposed approach combines a specially designed calibration cartridge with a high-fidelity model of the furnace/cavity ensemble to relate the signal from calibration cartridge to furnace control thermocouple setpoints. The proposed technique relies on a unique approach which eliminates thermocouple error in the calibration process. The proposed system will be designed and tested by computer simulations in Phase I. Hardware development and experimental implementation will be undertaken in Phase II.

Potential Commercial Applications:

The proposed technique will be a novel and effective way for calibration of NASA as well as commercial furnaces. It can be used in calibration of crystal growth, wafer annealing, whole-boule annealing, and Chemical Vapor Deposition furnaces. The use of such a system promises to bring operating conditions closer to desired conditions, improve quality and eventually reduce production costs. Producers and users of axisymmetric furnaces are potential commercial customers of this system.

Name and Address of Offeror:

Computer Aided Process Engineering (CAPE), Inc.
Suite 220
888 Worcester Street
Wellesley, MA 02181