SBIR 95-1 SOLICITATION
CVD OF SEMI-INSULATING SILICON CARBIDE
Interest is rapidly increasing in wide bandgap semiconductors for superior high frequency and high power electronics. Although silicon carbide (SiC) is the most advanced wide bandgap semiconductor from a materials and device processing point of view, extension to high frequency and high circuit density applications has been hindered by the lack of insulating or semi-insulating substrates. We propose to develop a thin film technology to grow semi-insulating SiC whose structure will be analogous to that of silicon on insulator (SOI). Instead of silicon dioxide, we will use vanadium-doped SiC, grown by chemical vapor deposition, as the insulator. Semi-insulating SiC epitaxial layers will enable the development of improved high frequency SiC devices, novel sensor passivation schemes for corrosive environments, and three dimensional integration of multiple devices. In Phase I we will investigate the CVD growth of vanadium-doped SiC films to achieve semi-insulating layers. In Phase II we will optimize the growth of semi-insulating SiC thin films and promote development of a SOI device technology through fabrication of prototype devices at ATMI and in collaboration with commercial and government laboratories.
Potential Commercial Applications:
The availability of semi-insulating SiC layers will enable not only the substrate isolation but a variety of novel device structures that will exploit SiC's broad range of exceptional physical and electronic properties. Applications include integration of high power, high frequency discrete devices and circuits and sensors and electronics designed for high temperature operation.
Name and Address of Offeror:
Advanced Technology Materials, Inc.
7 Commerce drive
Danbury, CT 06810
Small Business Innovation Research Program (SBIR) &
Small Business Technology Transfer Program (STTR) Programs
Electronic Management System (EMS)
National Aeronautics and Space Administration (NASA)
The SBIR/STTR EMS site is maintained by Steve
Hu, Hughes STX.
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Updated: Feb. 7, 1996