Project Title:


92-1-08.27-6000                                                    NAS07-1210
Feedback-Controlled, MetalOrganic-Chemical-Vapor-
     Deposition Reactor for the Indium-Gallium-
Arsenic-Phosphorus Materials System
Spire Corporation
One Patriots Park
Bedford, MA  01730-2396
Nasser H. Karam                                      (617-275-6000)

Abstract:

Potential Commercial Application: