Novel, Mercury-Cadmium-Telluride Growth Process
Novel, Mercury-Cadmium-Telluride Growth
Advanced Technology Materials, Inc.
520-B Danbury Road
New Milford, CT 06776
James D. Parsons
Mercury-cadmium-telluride (MCT) alloys are of major importance for non-cryogenically
cooled, l.0-to-16.0 microns IR-detector arrays, but their use has been slowed by
the dearth of repeatable growth processes capable of producing high-quality films
and devices with abrupt or controlled junctions. A new, unassisted, pyrolytic metal-organic
chemical-vapor-deposition (MOCVD) approach will be developed to grow epitaxial Hg1-xCdxTe
(x < 1) alloys with +l percent composition and thickness uniformity over a large
area. High mercury concentrations at 10 microns/hour growth rates and substrate temperatures
below 300oC should be possible with this method. This approach will use a unique
reagent system to enhance the growth process and incorporate a novel reactant-inlet
port to increase the vapor pressure of mercury at the growth surface. Phase I will
yield a reproducible, epitaxial MCT growth process and lay the foundation for MCT,
IR-detector-photodiode manufacturing process development in Phase II.
Potential Commercial Application:
Potential Commercial Applications: Applications are possible in space-based, airborne,
and ground passive imaging systems including uses as diverse as satellite mapping,
automobile avoidance, and fighter-aircraft early warning systems.