NASA SBIR 2004 Solicitation


SUBTOPIC TITLE:Exploiting Gravitational Effects for Combustion, Fluids, Synthesis, and Vibration Technology
PROPOSAL TITLE:CMOS-MEMS Microgravity Accelerometer with High-Precision DC Response

SMALL BUSINESS CONCERN (Firm Name, Mail Address, City/State/Zip, Phone)
Evigia Systems, Inc.
2805 Windwood Dr. #10
Ann Arbor ,MI 48105 - 1487
(734) 302 - 1140

PRINCIPAL INVESTIGATOR/PROJECT MANAGER (Name, E-mail, Mail Address, City/State/Zip, Phone)
Navid   Yazdi
2805 Windwood Dr. #10
Ann Arbor, MI  48105 -1487
(734) 302 - 1140

TECHNICAL ABSTRACT (Limit 2000 characters, approximately 200 words)
In this Phase II SBIR project a high-sensitivity low-noise all-silicon CMOS-MEMS accelerometer for quasi-steady measurements of accelerations at sub 1 micro-g levels will be developed. The outcome of the project is a capacitive microaccelerometer with a resolution of 90ng/sqrt-Hz over +/-0.1g range for Type A sensor and 0.8ug/sqrt-Hz over +/-1g for Type B sensor with programmable bandwidth from DC to programmable 0.1Hz-100Hz. The accelerometer module includes integrated low-noise CMOS circuitry with active offset and low-frequency noise cancellation to enable high-precision DC measurements. The high-performance of the sensor is enabled by innovation in both MEMS accelerometer and readout circuit technologies: i) Single-crystalline silicon capacitive accelerometer structure. The device has high sensitivity and low thermo-mechanical noise; ii) Innovative high-yield fabrication process that enables formation of high-sensitivity devices on top of CMOS wafers; iii) New and improved low-noise capacitive sensor readout CMOS circuit. This novel microaccelerometer has several NASA applications including measurement of residual accelerations on spacecraft and ground-based low-gravity facilities.

POTENTIAL NASA COMMERCIAL APPLICATIONS (Limit 1500 characters, approximately 150 words)
The proposed CMOS-MEMS accelerometer will reduce the size, mass, power requirements and cost of the instruments for measuring the residual accelerations on spacecraft or in ground-based low-gravity facilities. By using innovative device and circuit technologies the proposed MEMS sensor can resolve sub micro-g quasi-static accelerations as solicited by GRC and MSFC under topic B1.01 (Exploiting Gravitational Effects for Combustion, Fluids, Synthesis, and Vibration Technology). Also this device can be employed for space drag measurements, space platform stabilization, and miniature self-contained or GPS-augmented navigation systems for micro-satellites, spacecrafts, aircrafts, and ground vehicles.

POTENTIAL NON-NASA COMMERCIAL APPLICATIONS (Limit 1500 characters, approximately 150 words)
High precision accelerometers with micro-g sensitivity have several other applications including self-contained and GPS-augmented navigation and guidance systems, seismometry for oil-exploration and earthquake prediction, aerial mapping of gravitational forces for mining and natural resources exploration, tilt measurements and platform stabilization, and underwater acoustic measurements. The impact of low cost, small, high-performance micromachined accelerometers in these applications is not just limited to reducing overall size, cost and weight. It opens up new market opportunities such as personal miniature navigators.

Form Printed on 08-01-05 13:52