AIGaN UV Solar-Blind Detector Array

Superior Vacuum Technology Associates

Eden Prairie, MN 
 

Protovoltaic detector array with high quantum efficiency fabricated from aluminum gallium nitride (AIGaN)

• Demonstrated AIGaN UV detector which is blind to visible and IR wavelengths, with best published UV/visible rejection ratios for nitride detector
• Detector capable of 90% quantum efficiency response at 360 nm and shorter wavelength response better than commercial Si UV enhanced diodes
• Developed nitride growth technology using RF nitrogen plasma source

• Over 45 RF nitrogen plasma sources have been sold to multiple industrial users and universities at $30 K each for molecular beam epitaxy (MBE) nitride deposition
• Five MBE systems designed fro AIGaN growth sold
• Delivering AIGaN device epitaxy wafers to numerous research groups

• High temperatures flame sensor for combustion monitoring
• UV focal plane array for astronomical observations
• Missile detection and guidance
• UV spectroscopy

Return to NASA SBIR Success Listings